Maskless Lithography System
Model: Smart Print UV | Manufacturer: Microlight3D (France)
| Overview
Smart Print UV by Microlight3D is a maskless lithography system that uses Digital Micromirror Devices. (DMD) projection technology to pattern micron-scale features directly onto substrates without the need for hard masks. It enables fast, flexible, and high-precision surface patterning across a wide range of materials and formats for applications in microelectronics, microfluidics, and biotechnology.
| Key Features
Fabrication Technology
Maskless lithography via DMD projection – Smart Print UV uses a Digital Micromirror Device (DMD) to project patterns optically onto a photoresist, eliminating the need for physical photomasks. This allows rapid direct patterning, reducing setup time and cost for microfabrication workflows.
Laser Source
385 nm UV LED light source – The system employs a dedicated UV LED source tuned to the 385 nm wavelength. This makes it compatible with standard microelectronic photoresists such as SU-8 and other broadband resists used in microfabrication.
Laser Wavelength
532 nm (green laser) – The wavelength is optimized for efficient two-photon absorption in photopolymer resins. It supports high-resolution writing and stable polymerization conditions.
Minimum Feature Size
Down to ~1.5 µm resolution – Depending on objective selection, Smart Print UV can produce features as small as ~1.5 microns. This provides sufficient resolution for typical microfluidic, biosensor, and MEMS patterning needs.
Writing Field & Objectives
Adjustable writing field with interchangeable optics – Four writing resolutions can be selected through quick-release objectives. This balances writing precision and speed and allows patterning over variable fields of view.
Alignment System
Secondary 590 nm light & camera feedback – An integrated alignment camera with a 590 nm secondary illumination source allows intuitive overlay of designs on the substrate. This enhances placement accuracy and reduces manual alignment effort.
Substrate Compatibility
Supports a wide range of substrates up to 5″ square – The long objective working distance (up to ~3 cm) makes it compatible with non-flat, flexible, thick, or unconventional substrates. Substrates can include silicon, glass, metal, and plastics.
Footprint & Form Factor
Tabletop system with compact dimensions – With a small footprint (approx. 52 × 52 × 69 cm), the system fits easily in labs and cleanrooms. It operates as a standalone unit without external peripherals required.
Software & Control
Integrated intuitive control software (Phaos) – The included Phaos software lets users go from design to print in a few clicks, with built-in alignment and dose control features. It supports common file formats like CAD and bitmaps.
Materials Compatibility
Compatible with i-, h-, and g-line photoresists – Smart Print UV works with the widest set of standard UV photoresists (positive and negative), including SU-8 and AZ series. This flexibility supports diverse fabrication needs in research and prototyping.
Applications
Surface micro-patterning, microelectronics, microfluidics, biotechnologies, MEMS, lab-on-chip devices, sensors, and micro-optics. Ideal for research, development, and small series production where rapid design changes are needed. Widely used in both academic and industrial microfabrication settings.